Phase-graded deposition of diamond-like carbon on nanotips by near-field induced chemical vapor deposition

Applied Physics Letters

Volumn 86, Issue 13, 2005, Pages 1-3

  Shi, J ^a   Lu, Y F ^a   Chen, X Y ^b   Cherukuri, R S ^a   Mendu, K K ^a   Wang, H ^a   Batta, N ^a  

^a UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^b NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

LASER CHEMICAL VAPOR DEPOSITION (LCVD); OPTICAL FIELDS; OPTICAL INTENSITIES; OPTICAL NEAR-FIELD-INDUCED DEPOSITION (ONFID);

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; DEPOSITION; ETCHING; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 17644404754     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1887840     Document Type: Article

References (11)

1. J. Wessel, J. Opt. Soc. Am. B 2, 1538 (1985).
2. U. C. Fischer and D. W. Pohl, Phys. Rev. Lett. 62, 458 (1989).
3. Y. F. Lu, Z. H. Mai, G. Qiu, and W. K. Chim, Appl. Phys. Lett. 75, 2359 (1999).
4. L. Novotny, R. X. Bian, and X. S. Xie, Phys. Rev. Lett. 79, 645 (1997).
5. J. Shi, Y. F. Lu, R. S. Cherukuri, K. K. Mendu, D. W. Doerr, D. R. Alexander, L. P. Li, and X. Y. Chen, Appl. Phys. Lett. 85, 1009 (2004).
6. J. P. Ibe, P. P. Bey Jr., S. L. Brandow, R. A. Brizzolara, N. A. Burnham, D. P. Dilella, K. P. Lee, C. R. K. Marrian, and R. J. Colton, J. Vac. Sci. Technol. A 8, 3570 (1990).
7. Y. F. Lu, S. M. Huang, X. B. Wang, and Z. X. Shen, Appl. Phys. A: Mater. Sci. Process. 66, 543 (1998).
8. Y. F. Lu, S. M. Huang, C. H. A. Huan, and X. F. Luo, Appl. Phys. A: Mater. Sci. Process. 68, 647 (1999).
9. D. Beeman, J. Silverman, R. Lynds, and M. R. Anderson, Phys. Rev. B 30, 870 (1984).
10. A. Richter, H-J. Scheibe, W. Pompe, K-W. Brzezinka, and I. Muhling, J. Non-Cryst. Solids 88, 131 (1986).
11. M. Yoshikawa, G. Katagiri, H. Ishida, and A. Ishitani, J. Appl. Phys. 64, 6464 (1988).