Dielectric layers SiO 2: TiO 2 produced using the sol-gel technology for the application in planar sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5576, Issue , 2004, Pages 176-180

  Karasiński, Paweł ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Planar sensor; Planar waveguide; Sol gel

Indexed keywords

PLANAR SENSORS; PLANAR TECHNOLOGIES; PLANAR WAVEGUIDE; WAVEGUIDE LAYERS;

DIELECTRIC MATERIALS; REFRACTIVE INDEX; REFRACTOMETERS; SILICA; SOL-GELS; TITANIUM DIOXIDE; WAVEGUIDES;

SENSORS;

EID: 17644403103     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.581741     Document Type: Conference Paper

References (8)

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