Characterizations of CNx thin films made by ionized physical vapor deposition

Thin Solid Films

Volumn 482, Issue 1-2, 2005, Pages 192-196

  Tetard F ^a   Djemia, P ^a   Besland, M P ^a   Tessier, P Y ^a   Angleraud, B ^a  

^a NONE

Author keywords

Antenna; Brillouin light scattering; Cnx; FTIR; Ionized PVD; Wettability

Indexed keywords

BRILLOUIN SCATTERING; CARBON NITRIDE; FOURIER TRANSFORM INFRARED SPECTROSCOPY; IONIZATION; PHYSICAL VAPOR DEPOSITION; SPUTTERING; STAINLESS STEEL;

ANTENNA; CNX; IONIZED PVD; WETTABILITY;

THIN FILMS;

EID: 17644397840     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.11.172     Document Type: Conference Paper

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