Compressive stress, preferred orientation and film composition in Ti-based coatings developed by plasma immersion ion implantation-assisted deposition

Surface and Coatings Technology

Volumn 186, Issue 1-2 SPEC. ISS., 2004, Pages 99-103

  Mukherjee, S ^a   Prokert, F ^b   Richter, E ^b   Moeller, W ^b  

^a INSTITUTE FOR PLASMA RESEARCH   (India)

^b INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

Author keywords

Ion implantation; Stress; TiN; TRIDYN

Indexed keywords

ALUMINUM ALLOYS; COATINGS; COMPRESSIVE STRESS; COMPUTER SIMULATION; DEPOSITION; ION IMPLANTATION; PLASMA SOURCES; SPUTTERING;

ATOMIC PEENING EFFECTS; FILM COMPOSITION; PLASMA IMMERSION ION IMPLANTATION (PIII); THERMAL SPIKES;

PLASMAS;

TITANIUM NITRIDE;

EID: 17644375496     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2004.04.019     Document Type: Article

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