Fabrication of a piezoelectric biosensor based on a PZN-PT/PMN-PT single crystal thin film

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5602, Issue , 2004, Pages 140-147

  Hong, Yong K ^a   Park, Heung Keun ^a   Lee, Sung Q ^b   Moon, Kee S ^a   Levy, M ^c  

^a Michigan Technological University   (United States)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

Author keywords

Micro cantilever; Piezoelectric biosensor; PMN PT; PZN PT; QCM

Indexed keywords

MICROCANTILEVERS; PIEZOELECTRIC BIOSENSORS; PMN-PT; PZN-PT; QUARTZ CRYSTAL MICROBALANCE (QCM);

ETCHING; GAS LASERS; LEAD COMPOUNDS; NATURAL FREQUENCIES; SINGLE CRYSTALS; THIN FILMS; TRANSDUCERS;

BIOSENSORS;

EID: 17644366128     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.571553     Document Type: Conference Paper

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