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Applied Surface Science

Volumn 113-114, Issue , 1997, Pages 231-237

Selected-area deposition of diamond films on SiN/Si surfaces with microwave plasma enhanced CVD

(3) Chen, Yung Hsin a Hu, Chen Ti a Lin, I Nan a

a NATIONAL TSING HUA UNIVERSITY (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; DIAMOND FILMS; IONS; MICROWAVES; PLASMA APPLICATIONS; PRESSURE EFFECTS; RAMAN SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; SILICON; SILICON NITRIDE; SURFACES;

SELECTED AREA DEPOSITION;

THIN FILMS;

EID: 17544404926 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/S0169-4332(96)00769-6 Document Type: Article

Times cited : (1)

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