Stoichiometric effects of sputtered Barium Strontium Titanate films

Materials Research Society Symposium - Proceedings

Volumn 493, Issue , 1998, Pages 21-26

  Baumert, B A ^a   Tsai, T L ^a   Chang, L H ^a   Remmel, T P ^a   Kottke, M L ^a   Fejes, P L ^a   Chen, W ^a   Ehlert, E P ^a   Sullivan, D F ^a   Tracy, C J ^a   Melnick, B M ^a  

^a MOTOROLA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; FILMS; LATTICE CONSTANTS; MAGNETRON SPUTTERING; PERMITTIVITY; THERMAL EFFECTS; TITANIUM COMPOUNDS;

THICKNESS EFFECTS;

FERROELECTRIC MATERIALS;

EID: 17544390373     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)