Growth and electrical properties of reactively sputtered WSx thin films

Solid State Phenomena

Volumn 51-52, Issue , 1996, Pages 335-340

  Regula, M ^a   Ballif, C ^a   Levy F ^a  

^a EPFL   (Switzerland)

Author keywords

Sputtering; Sulphides; Tungsten

Indexed keywords

EID: 17544375219     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

References (5)

1. E. Bucher, in Photoelectrochemistry and photovoltaics of layered semiconductors, A. Aruchamy, editor, (Kluwer, Dordrecht 1992), p. 2
2. J.A. Baglio, G.S. Calabrese, E. Kamieniecki, R. Kershaw, C.P. Kubiak, A.J. Ricco, A. Wold, M.S. Wrighton, and G.D. Zoski, J. Electrochem. Soc. 129, 1461 (1982)
3. A. Jäger-Waldau, M.Ch. Lux-Steiner, and E. Bucher, Sol. State Phenom. 37-38, 479 (1994)
4. M. Regula, C. Ballif, J. Moser, and F. Lévy, submitted to Thin Solid Films
5. B.L.Evans, in Physics and Chemistry of Materials with Layered Structures, Vol. 4 (D. Reidel, Dordrecht 1976), p. 128