Composition dependence of hardness and elastic modulus in Si-Ge measured by nanoindentation - Possible consequences for elasto-plastic relaxation and diffusion

Solid State Phenomena

Volumn 47-48, Issue , 1996, Pages 509-516

  Roos, B ^a   Richter, H ^a   Wollweber, J ^b  

^a IHP   (Germany)

^b LEIBNIZ INSTITUTE FOR CRYSTAL GROWTH   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DEFECTS; ELASTIC MODULI; ELASTOPLASTICITY; HARDNESS; NANOINDENTATION; SEMICONDUCTOR DEVICE MANUFACTURE;

ALLOY HARDENING; COMPOSITION DEPENDENCE; ELASTO-PLASTIC; HARDNESS AND ELASTIC MODULUS; HARDNESS AND MODULUS; MAXIMUM HARDNESS; NANO-INDENTATION MEASUREMENTS; THERMODYNAMICAL PROPERTIES;

SI-GE ALLOYS;

EID: 17544372969     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

References (32)

1. S.C. Jain, Germanium-Silicon Strained Layers and Heterostructures (Academic, New York, 1994)
2. A. Fischer, H. Kühne, B. Roos, and H. Richter, Semicond. Sci. Technol. 9, 2195 (1994)
3. M.G. Kekua and E.V. Knutsishvili, Inorg. Mater. 3, 1030 (1967) and references therein; M.G. Kekua, E.I. Velijulin, N.U. Gamkrelidze, and K.S. Berdzenishvili, phys. stat. sol.(a) 143, K79 (1994)
4. M.G. Kekua and E.V. Knutsishvili, Inorg. Mater. 3, 1030 (1967) and references therein; M.G. Kekua, E.I. Velijulin, N.U. Gamkrelidze, and K.S. Berdzenishvili, phys. stat. sol.(a) 143, K79 (1994)
5. S. P. Baker and E. Arzt, in Properties of Strained and Relaxed Silicon Germanium, edited by E. Kasper (Inspec, Exeter, 1995), p. 67
6. V.T. Bublik, S.S. Gorelik, A.A. Zaitsev, and A.Y. Poyakov, phys.stat.sol. (b) 66, 427 (1974)
7. H. Brugger, G. Abstreiter, H. Jorke, H. J. Herzog, and E. Kasper, Phys. Rev. B 33, 5928 (1986)
8. D. Krüger, Th. Morgenstern, R. Kurps, E. Bugiel, Ch. Quick, and H. Kühne, J. Appl. Phys. 75, 7829 (1994)
9. B. Tülack, G. Ritter, D. Krüger, P. Zaumseil, G. Morgenstern, and K.-D. Glowatzki, to be published in Materials Science and Technology
10. B. Roos and F. Ernst, J. Cryst. Growth 137, 457 (1994)
11. J. Donecker, A. Gerhardt, and J. Wollweber, Mat. Sci. Eng. B 28, 18 (1994)
12. B. S. Roos, H. Richter, T. Morgenstern, and B. Tillack, in Thin Films: Stresses and Mechanical Properties V, edited by S. P. Baker et al.(Mat. Res. Soc. Proc. 356, Pittsburgh, PA, 1995), p. xxx
13. G. M. Pharr, W. C. Oliver, and D. R. Clarke, J. Electron. Mat. 19, 881 (1990)
14. T. F. Page, W. C. Oliver, and C. J. Mc Hargue, J. Mater. Res. 7, 450 (1992)
15. M. F. Doemer and W. D. Nix, J. Mater. Res. 1, 601 (1986)
16. N. A. Goryonova, A. S. Borshchevkii, and D. N. Tretiakov, in Semiconductors and Semimetals, edited by R. K. Willardson and A. C. Beer (Academic Press, New York, 1968), Vol. 4, p.3
17. C. W. Myles and S. N. Ekpenuma, J. Vac. Sci. Technol. B 10, 1454 (1992)
18. A. Werner, J. A. Sanjurjo, and M. Cardona, Solid State Comm. 44, 155 (1982)
19. G. M. Pharr and W. C. Oliver, MRS Bulletin, July (1992), p. 28
20. A.-B. Chen, A. Sher, and W. T. Yost, in Semiconductors and Semimetals, edited by R. K. Willardson, A. C. Beer, and E. R. Weber (Academic Press, New York, 1992), Vol. 37, p. 1
21. W. A. Harrison, Electronic Structure and the Properties of Solids (Dover, New York, 1989)
22. CRC Handbook of Chemistry and Physics, ed. by D. R. Lide (CRC Press, Boca Raton, 1992)
23. H. Siethoff, Appl. Phys. Lett. 65, 174 (1994), J. J. Gilman, J. Appl. Phys. 46, 5110 (1975)
24. H. Siethoff, Appl. Phys. Lett. 65, 174 (1994), J. J. Gilman, J. Appl. Phys. 46, 5110 (1975)
25. S. M. Prokes, O. J. Glembocki, and D. J. Godbey, Appl. Phys. Lett. 60, 1087 (1992)
26. W. D. Nix, D. B. Noble, and J. F. Turlo, MRS Symp. Proc. 188, 315 (1990) and references therein
27. C. S. Menoni, J. Z. Hu, and I. L. Spain, in High Pressure in Science and Technology, edited by C. Homan, R. K. MacCrone, and E. Whalley (North-Holland, New York, 1984), Vol. 3, p. 121
28. H. B. Huntington, The Elastic Constants of Crystals (Academic Press, New York, 1958), p. 130
29. H. Kajiyama, S.-I. Muramatsu, T. Shimada, and Y. Nishino, Phys. Rev. B 45, 14005 (1992)
30. A. Qteish and R. Resta, Phys. Rev. B 37, 1308 (1987)
31. V. T. Bublik and V. N. Leikin, phys. stat. sol. (a) 46, 365 (1978)
32. P. Zaumseil, G. G. Fischer, Ch. Quick, and A. Misiuk, (this conference proceedings)