Silicon materials and metrology: Critical concepts for optimal 1C performance in the gigabit era

Solid State Phenomena

Volumn 47-48, Issue , 1996, Pages 65-96

  Huff, H R ^a   Goodall, R K ^a  

^a SEMATECH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BUDGET CONTROL; COBALT COMPOUNDS; DEFECTS; INTEGRATED CIRCUITS; REGULATORY COMPLIANCE; SEMICONDUCTOR DEVICE MANUFACTURE; TIMING CIRCUITS;

COST OF OWNERSHIP; EPITAXIAL STRUCTURE; EPITAXIAL WAFERS; MODEL-BASED OPC; PROCESS SIMULATORS; SILICON MATERIALS; TECHNOLOGY ROADMAPS; THERMAL BUDGET;

SILICON WAFERS;

EID: 17544367755     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Article

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