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Volumn 51-52, Issue , 1996, Pages 161-166
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Growth of n-type microcrystalline silicon at different plasma excitation frequencies
a
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Author keywords
Microcrystalline silicon growth process; Transmission electron microscopy; VHF PECVD
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Indexed keywords
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EID: 17544366256
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: 10.4028/www.scientific.net/ssp.51-52.161 Document Type: Article |
Times cited : (2)
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References (8)
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