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Volumn 51-52, Issue , 1996, Pages 161-166

Growth of n-type microcrystalline silicon at different plasma excitation frequencies

Author keywords

Microcrystalline silicon growth process; Transmission electron microscopy; VHF PECVD

Indexed keywords


EID: 17544366256     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.51-52.161     Document Type: Article
Times cited : (2)

References (8)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.