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Volumn 82-84, Issue , 2002, Pages 783-788
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Structure and stability of thin praseodymium oxide layers on Si(001)
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Author keywords
Ab initio simulations; AES; Heteroepitaxial growth; High K gate material; Initial stages; STM; XPS
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Indexed keywords
AUGER ELECTRON SPECTROSCOPY;
COMPUTER SIMULATION;
DIELECTRIC MATERIALS;
EPITAXIAL GROWTH;
INTERFACES (MATERIALS);
SCANNING ELECTRON MICROSCOPY;
STRUCTURE (COMPOSITION);
THERMODYNAMIC STABILITY;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
X RAY PHOTOELECTRON SPECTROSCOPY;
CHARGE MISMATCH;
FIRST PRINCIPLES TOTAL ENERGY CALCULATIONS;
HETEROEPITAXIAL GROWTH;
PRASEODYMIUM OXIDE;
PRASEODYMIUM COMPOUNDS;
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EID: 17444443121
PISSN: 10120394
EISSN: None
Source Type: Book Series
DOI: None Document Type: Conference Paper |
Times cited : (2)
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References (11)
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