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Volumn 82-84, Issue , 2002, Pages 783-788

Structure and stability of thin praseodymium oxide layers on Si(001)

Author keywords

Ab initio simulations; AES; Heteroepitaxial growth; High K gate material; Initial stages; STM; XPS

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; DIELECTRIC MATERIALS; EPITAXIAL GROWTH; INTERFACES (MATERIALS); SCANNING ELECTRON MICROSCOPY; STRUCTURE (COMPOSITION); THERMODYNAMIC STABILITY; THIN FILMS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 17444443121     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper
Times cited : (2)

References (11)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.