Effects of surface roughness on gas flow conductance in channels estimated by conical roughness model

Applied Surface Science

Volumn 169-170, Issue , 2001, Pages 787-791

  Sugiyama, W ^a   Sawada, T ^a   Yabuki, M ^a   Chiba, Y ^a  

^a AKITA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHANNEL FLOW; MATHEMATICAL MODELS; MONTE CARLO METHODS; WALL FLOW;

CONICAL ROUGHNESS MODEL;

SURFACE ROUGHNESS;

EID: 17444435943     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(00)00792-3     Document Type: Article

References (4)

1. Sawada T., Nakamura M. J. Vac. Soc. Jpn. 34:1991;311.
2. Sawada T. J. Vac. Soc. Jpn. 37:1994;218.
3. Sawada T., Horie B.Y., Sugiyama W. Vac. 47:1996;795.
4. T. Sawada, B.Y. Horie, W. Sugiyama, in: C. Shen (Ed.), Rarefied Gas Dynamics 20, China, Beijing, 1997, p. 618.