Modeling injection of dense liquid sprays in radio frequency inductively coupled plasmas

Plasma Chemistry and Plasma Processing

Volumn 25, Issue 3, 2005, Pages 193-214

  Shan, Yanguang ^a   Mostaghimi, Javad ^a  

^a UNIVERSITY OF TORONTO   (Canada)

Author keywords

Droplet collisions; Liquid sprays; Radio frequency inductively coupled plasmas; Stochastic spray model

Indexed keywords

CHEMICAL VAPOR DEPOSITION; COALESCENCE; COMPUTER SIMULATION; EVAPORATION; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; PLASMA SPRAYING; RANDOM PROCESSES; VISCOSITY;

DROPLET COLLISIONS; LIQUID SPRAYS; RADIO FREQUENCY INDUCTIVELY COUPLED PLASMAS; STOCHASTIC SPRAY MODELS;

INDUCTIVELY COUPLED PLASMA;

EID: 17444401020     PISSN: 02724324     EISSN: None     Source Type: Journal    
DOI: 10.1007/s11090-004-3027-9     Document Type: Article

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