Nitridation and subsequent oxidation process of Si(111) and (100) surfaces for high-density Si pillar formation

Applied Surface Science

Volumn 117-118, Issue , 1997, Pages 131-135

  Tabe, M ^a   Yamamoto, T ^a   Terao, Y ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

LOCOS; Nanostructures; Nitridation; Oxidation; Silicon

Indexed keywords

CRYSTAL ORIENTATION; DENSITY (SPECIFIC GRAVITY); NANOSTRUCTURED MATERIALS; OXIDATION; OXIDATION RESISTANCE; SCANNING TUNNELING MICROSCOPY; SILICON NITRIDE; SURFACE STRUCTURE; THERMAL EFFECTS; VACUUM; X RAY PHOTOELECTRON SPECTROSCOPY;

LOCAL OXIDATION OF SILICON (LOCOS); NITRIDATION;

SEMICONDUCTING SILICON;

EID: 17344391593     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)80066-9     Document Type: Article

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