Scanning photoluminescence for wafer characterization

Solid State Phenomena

Volumn 63-64, Issue , 1998, Pages 421-432

  Higgs, V ^a   Chin, F ^a   Wang, X ^a  

^a Bio Rad Micromeasurements   (United Kingdom)

Author keywords

Defects; Epilayers; Photoluminescence; Si Wafers

Indexed keywords

CRYSTAL DEFECTS; ETCHING; NONDESTRUCTIVE EXAMINATION; PHOTOLUMINESCENCE; SEMICONDUCTOR GROWTH; SURFACE CLEANING; TRANSMISSION ELECTRON MICROSCOPY;

SCANNING PHOTOLUMINESCENCE;

SILICON WAFERS;

EID: 17344369135     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/ssp.63-64.421     Document Type: Article

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