Visible and infrared ellipsometry applied to the study of metal-containing diamond-like carbon coatings

Thin Solid Films

Volumn 455-456, Issue , 2004, Pages 370-375

  Corbella, C ^a   Pascual, E ^a   Canillas, A ^a   Bertran, E ^a   Andujar J L ^a  

^a UNIVERSITY OF BARCELONA   (Spain)

Author keywords

Ellipsometry; Me DLC; Nanocrystalline carbidic particles; Optical properties

Indexed keywords

ARGON; ELLIPSOMETRY; FOURIER TRANSFORM INFRARED SPECTROSCOPY; INFRARED RADIATION; MAGNETRON SPUTTERING; METHANE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; REFRACTIVE INDEX; X RAY DIFFRACTION ANALYSIS;

HARD COATINGS; ME-DLC; METHANE FLOW; NANOCRYSTALLINE CARBIDIC PARTICLES;

DIAMOND LIKE CARBON FILMS;

EID: 17144471381     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2003.11.282     Document Type: Conference Paper

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