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Volumn 38, Issue 2, 1995, Pages
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Extending optical lithography to the gigabit era
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Author keywords
[No Author keywords available]
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Indexed keywords
INTEGRATED CIRCUIT MANUFACTURE;
LIGHTING;
MASKS;
MICROPROCESSOR CHIPS;
OPTICAL INTERCONNECTS;
OPTICAL SYSTEMS;
PROCESS ENGINEERING;
RANDOM ACCESS STORAGE;
TECHNOLOGY;
DEEP ULTRAVIOLET;
OFFAXIS ILLUMINATION;
OPTICAL LITHOGRAPHY;
OPTICAL PROXIMITY;
PATTERNING PARADIGM;
SUBHALF MICRON;
PHOTOLITHOGRAPHY;
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EID: 17144470204
PISSN: 0038111X
EISSN: None
Source Type: Trade Journal
DOI: None Document Type: Article |
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Times cited : (10)
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References (13)
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