Phase transformations in nitrogen-implanted iron layers

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 175-177, Issue , 2001, Pages 448-452

  Jagielski, J ^a,b   Kopcewicz, M ^a   Matz, W ^c   Grotzschel R ^c   Thome L ^d  

^a ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^b SOLTAN INSTITUTE FOR NUCLEAR STUDIES   (Poland)

^c INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH   (Germany)

^d CENTRE DE CALCUL DE L INSTITUT NATIONAL DE PHYSIQUE NUCLEAIRE ET DE PHYSIQUE DES PARTICULES   (France)

Author keywords

Ion implantation; Phase formation; Thin films

Indexed keywords

IRON; METALLIC FILMS; NITRIDES; PHASE TRANSITIONS; THIN FILMS;

IRON NITRIDES;

ION IMPLANTATION;

EID: 17144453307     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(00)00636-4     Document Type: Conference Paper

References (13)