Absolute photo-absorption cross sections and electronic state spectroscopy of selected fluorinated hydrocarbons relevant to the plasma processing industry

Radiation Physics and Chemistry

Volumn 68, Issue 1-2, 2003, Pages 187-192

  Limao Vieira P ^a,b,c   Eden, S ^a   Mason, N J ^a  

^a UNIVERSITY COLLEGE LONDON   (United Kingdom)

^b UNIVERSIDADE NOVA DE LISBOA   (Portugal)

^c INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

Electron energy loss spectroscopy (EELS); Photolysis rates; Plasma etching; Synchrotron radiation; VUV photo absorption

Indexed keywords

ABSORPTION; ELECTRON ENERGY LOSS SPECTROSCOPY; GLOBAL WARMING; METHANE; OZONE; PHOTOLYSIS; PLASMA APPLICATIONS; SYNCHROTRON RADIATION;

CROSS SECTIONS;

RADIATION CHEMISTRY;

DICHLORODIFLUOROMETHANE; FLUORINE; HYDROCARBON; METHYL IODIDE; OZONE;

ATMOSPHERE; CONFERENCE PAPER; ELECTRONICS; FLUORINATION; GREENHOUSE EFFECT; INDUSTRY; LAND BIOME; LIGHT ABSORPTION; NEUTRON RADIATION; OBSERVATION; PHOTOLYSIS; PLASMA; RADIATION; RADIATION ABSORPTION; SPECTROSCOPY; SYNCHROTRON;

EID: 17144451085     PISSN: 0969806X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0969-806X(03)00278-0     Document Type: Conference Paper

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