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Volumn 109 PART 2, Issue , 2003, Pages 715-721
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Integrating constructability into cleanroom design
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Author keywords
[No Author keywords available]
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Indexed keywords
AIR CONDITIONING;
CONSTRUCTION;
DESIGN;
SEMICONDUCTOR DEVICE MANUFACTURE;
CLEANROOM DESIGN;
CONSTRUCTIBILITY;
CLEAN ROOMS;
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EID: 17144440398
PISSN: 00012505
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
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Times cited : (1)
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References (0)
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