메뉴 건너뛰기




Volumn 455-456, Issue , 2004, Pages 342-345

In-situ GIXRD characterization of the crystallization of Ni-Ti sputtered thin films

Author keywords

Metal characterization; Nitinol; Shape memory alloy; Thin films; X ray diffraction

Indexed keywords

CRYSTALLIZATION; DEPOSITION; ENERGY DISPERSIVE SPECTROSCOPY; EVAPORATION; HEAT LOSSES; OXIDATION RESISTANCE; SCANNING ELECTRON MICROSCOPY; SHAPE MEMORY EFFECT; SPUTTERING; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

EID: 17044458405     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.455-456.342     Document Type: Conference Paper
Times cited : (3)

References (6)
  • 1
    • 0004226819 scopus 로고    scopus 로고
    • National Materials Advisory Board, National Academy Press, Washington, D.C
    • Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems: Microelectromechanical systems, advanced materials and fabrication methods (National Materials Advisory Board, National Academy Press, Washington, D.C. 1997).
    • (1997) Microelectromechanical Systems, Advanced Materials and Fabrication Methods


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.