Synthesis and deposition of coatings in the electron beam plasma

Surface and Coatings Technology

Volumn 180-181, Issue , 2004, Pages 132-135

  Vasiliev, M N ^a   Mahir, A H ^a  

^a MOSCOW INSTITUTE OF PHYSICS AND TECHNOLOGY   (Russian Federation)

Author keywords

Electron beam plasma; Plasmachemical treatment

Indexed keywords

CRYSTALS; DEPOSITION; PARAMETER ESTIMATION; PLASMAS; PROTECTIVE COATINGS; SYNTHESIS (CHEMICAL);

ELECTRON BEAM PLASMA (EBP); PLASMA PRESSURES;

ELECTRON BEAMS;

COATING;

EID: 16744363857     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2003.10.142     Document Type: Article

References (1)

1. Vasiliev M.N. The application of the electron beams in the plasmachemistry Fortov V.E. Encyclopedia of the Low-Temperature Plasma XI 2001 436-445 Nauka Moscow