Understanding AlN sintering through computational thermodynamics combined with experimental investigation

Journal of Materials Processing Technology

Volumn 161, Issue 3, 2005, Pages 415-422

  Medraj, M ^a   Baik, Y ^b   Thompson, W T ^c   Drew, R A L ^d  

^a Dept of Electrical and Computer Engineering   (Canada)

^b SAMSUNG Electronics   (South Korea)

^c ROYAL MILITARY COLLEGE OF CANADA   (Canada)

^d MCGILL UNIVERSITY   (Canada)

Author keywords

AlN sintering; AlN Al2O3 Y 2O3 phase diagram; Thermodynamic modeling

Indexed keywords

ALUMINUM NITRIDE; DATABASE SYSTEMS; DIELECTRIC PROPERTIES; INTEGRATED CIRCUITS; SINTERING; THERMAL CONDUCTIVITY; THERMAL EXPANSION;

ALN SINTERING; ALN-AL2O3-Y2O3 PHASE DIAGRAM; BINARY DIAGRAM; THERMODYNAMIC MODELING;

THERMODYNAMICS;

EID: 16444386610     PISSN: 09240136     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jmatprotec.2004.05.031     Document Type: Article

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