Diagnosis in submicron integrated circuits by electric force microscopy

Microelectronics Reliability

Volumn 36, Issue 7-8 SPEC. ISS., 1996, Pages 1113-1118

  Bohm C ^a   Sprengepiel, J ^a   Kubalek, E ^a  

^a UNIVERSITY OF DUISBURG ESSEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; BANDWIDTH; FAILURE ANALYSIS; VOLTAGE MEASUREMENT; WAVEGUIDES;

INTERNAL SIGNAL MEASUREMENT; SCANNING FORCE MICROSCOPE; VOLTAGE CONTRAST MEASUREMENT;

INTEGRATED CIRCUIT TESTING;

EID: 16444377283     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/0026-2714(96)00033-9     Document Type: Article

References (12)

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