Epitaxial ZnO films grown by RF-assisted low-temperature CVD method

Materials Science in Semiconductor Processing

Volumn 6, Issue 5-6, 2003, Pages 535-537

  Ataev, B M ^a   Mamedov, V V ^a   Omaev, A K ^a   Magomedov, B A ^a  

^a INSTITUTE OF PHYSICS   (Russian Federation)

Author keywords

CVD; RF assisted thin film growth; ZnO films

Indexed keywords

CHEMICAL VAPOR DEPOSITION; FILM GROWTH; LIGHT TRANSMISSION; LOW TEMPERATURE OPERATIONS; MORPHOLOGY; NUCLEATION; PLASMAS; THIN FILMS;

RADIO FREQUENCY (RF) ASSISTED FILM GROWTH; ZNO FILMS;

ZINC OXIDE;

EID: 1642634080     PISSN: 13698001     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mssp.2003.08.012     Document Type: Conference Paper

References (5)

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