Phase shifting SEM moiré method

Optics and Laser Technology

Volumn 36, Issue 4, 2004, Pages 291-297

  Xie, Huimin ^a   Shang, Haixia ^a   Dai, Fulong ^a   Li, Biao ^a   Xing, Yongming ^b  

^a TSINGHUA UNIVERSITY   (China)

^b Inner Mongolia Polytechnic University   (China)

Author keywords

Holographic grating; MEMS; Phase shifting technique; SEM scanning moir method; Strain

Indexed keywords

HOLOGRAPHY; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; SCANNING; SCANNING ELECTRON MICROSCOPY; SPECKLE; STRAIN;

HOLOGRAPHIC GRATING; PHASE SHIFTING INTERFEROMETRY;

PHASE SHIFT;

EID: 1642633100     PISSN: 00303992     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlastec.2003.09.012     Document Type: Article

References (7)

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