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Volumn 43, Issue 1, 2004, Pages 69-74

Computer-aided alignment for a reference transmission sphere of an interferometer

Author keywords

Alignment; Interferometers; Lenses; Optical design

Indexed keywords

COMPUTER AIDED ANALYSIS; COMPUTER PROGRAMMING LANGUAGES; COMPUTER SIMULATION; IMAGE QUALITY; INVERSE KINEMATICS; ITERATIVE METHODS; LENSES; LIGHT TRANSMISSION; MATRIX ALGEBRA; OPTICAL DESIGN; PHOTOSENSITIVITY; PROBLEM SOLVING;

EID: 1642603458     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1629121     Document Type: Article
Times cited : (32)

References (9)
  • 1
    • 0004402484 scopus 로고
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    • Y. H. Lee, "Alignment of an off-axis parabolic mirror with two parallel He-Ne laser beams," Opt. Eng. 31(11), 2287-2292 (1992).
    • (1992) Opt. Eng. , vol.31 , Issue.11 , pp. 2287-2292
    • Lee, Y.H.1
  • 2
    • 0025692986 scopus 로고
    • A computer aided optical alignment method
    • M. P. Rimmer, "A computer aided optical alignment method," Proc. SPIE 1271, 363-368 (1990).
    • (1990) Proc. SPIE , vol.1271 , pp. 363-368
    • Rimmer, M.P.1
  • 3
    • 0008446999 scopus 로고
    • Computer-aided alignment of a wide field, three-mirror, unobscured, high-resolution sensor
    • J. W. Figoski, T. E. Shrode, and G. F. Moore, "Computer-aided alignment of a wide field, three-mirror, unobscured, high-resolution sensor," Proc. SPIE 1049, 166-177 (1989).
    • (1989) Proc. SPIE , vol.1049 , pp. 166-177
    • Figoski, J.W.1    Shrode, T.E.2    Moore, G.F.3
  • 4
    • 0032402650 scopus 로고    scopus 로고
    • Rigorous method for compensation selection and alignment of microlithographic optical systems
    • H. N. Chapman and D. W. Sweeney, "Rigorous method for compensation selection and alignment of microlithographic optical systems," Proc. SPIE 3331, 102-113 (1998).
    • (1998) Proc. SPIE , vol.3331 , pp. 102-113
    • Chapman, H.N.1    Sweeney, D.W.2
  • 6
    • 0034225371 scopus 로고    scopus 로고
    • Misalignment modes in high-performance optical systems
    • M. R. Descour, M. R. Willer, D. S. Clarke, and Curtis E. Volin, "Misalignment modes in high-performance optical systems," Opt. Eng. 39(7), 1737-1747 (2000).
    • (2000) Opt. Eng. , vol.39 , Issue.7 , pp. 1737-1747
    • Descour, M.R.1    Willer, M.R.2    Clarke, D.S.3    Volin, C.E.4
  • 7
    • 0025546408 scopus 로고
    • Computer-aided alignment of a grazing incidence ring resonator for a visible wavelength free electron laser
    • R. Hudyma and L. C. Eigler, "Computer-aided alignment of a grazing incidence ring resonator for a visible wavelength free electron laser," Proc. SPIE 1354, 523-532 (1990).
    • (1990) Proc. SPIE , vol.1354 , pp. 523-532
    • Hudyma, R.1    Eigler, L.C.2
  • 9
    • 1642631940 scopus 로고    scopus 로고
    • Tolerance analysis and test of focus' coincidence with last surface's curvature center for reference lenses
    • Z. Gao and J. Chen, "Tolerance analysis and test of focus' coincidence with last surface's curvature center for reference lenses," Proc. SPIE 4927, 186-189(2002).
    • (2002) Proc. SPIE , vol.4927 , pp. 186-189
    • Gao, Z.1    Chen, J.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.