Tribology and Removal Rate Characteristics of Abrasive-Free Slurries for Copper CMP Applications

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 11, 2003, Pages 6809-6814

  DeNardis, Darren ^a   Sorooshian, Jamshid ^a   Habiro, Masanobu ^b   Rogers, Chris ^c   Philipossian, Ara ^a  

^a UNIVERSITY OF ARIZONA   (United States)

^b HITACHI LTD   (Japan)

^c Tufts University   (United States)

Author keywords

Abrasive free CMP; Chemical mechanical planarization (CMP); Copper CMP; Fourier transform spectral analysis

Indexed keywords

ABRASION; CHEMICAL MECHANICAL POLISHING; COMPLEXATION; CORROSION INHIBITORS; FLOW OF FLUIDS; FOURIER TRANSFORMS; FRICTION; LUBRICATION; PRESSURE EFFECTS; SILICA; SLURRIES; SPECTRUM ANALYSIS; TRIBOLOGY;

FRICTION COEFFICIENTS; INTERLAYER DIELECTRICS (ILD);

COPPER;

EID: 1642577079     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.6809     Document Type: Article

References (10)

1. S. Kondo, N. Sakuma, Y. Homma, Y. Goto, N. Ohashi, H. Yamaguchi and N. Owada: J. Electrochem. Soc. 147 (2000) 3907.
2. T. Saitoh, H. Nishizawa, J. Amanokura and M. Hanazono: Proc. Electrochemical Society Meeting in Pennington, NJ, 2002, Abstract No. 389.
3. A. Philipossian and E. Mitchell: Micro. 20 (2002) 85.
4. J. Lu, J. Coppeta, C. Rogers, V. Manno, L. Racz and A. Philipossian: Mater. Res. Soc. Symp. Proc. 613 (2000) E1.2.1.
5. S. F. Olsen: Master's Thesis, University of Arizona, Tucson, AZ, 2002.
6. K. Ludema: Friction, Wear, Lubrication: A Textbook in Tribology (CRC Press, Boca Raton, 1996) p. 117.
7. E. Brigham and H. Oren: The Fast Fourier Transform and Its Applications (Prentice-Hall, Englewood Cliffs, NJ, 1988) 1st ed.
8. A. Philipossian and S. Olsen: Proc. Electrochemical Society Meeting in Pennington, NJ, 2002, Abstract No. 385.
9. F. Preston: J. Soc. Glass Technol. 11 (1927) 214.
10. D. Hughes-Hallet, W. G. McCallum, A. M. Gleason, B. G. Osgood, D. E. Flath, A. Pasquale, S. P. Gordon, J. Tecosky-Feldman, D. O. Lomen, J. B. Thrash, D. Lovelock, K. R. Thrash, T. W. Tucker and O. K. Bretscher: Calculus (John Wiley & Sons, New York, 1994) p. 378.