Tunable thin film filters

Conference on Optical Fiber Communication, Technical Digest Series

Volumn 2003-January, Issue , 2003, Pages 522-524

  Domash, L ^a   Ma, E ^a   Nemchuk, N ^a   Payne, A ^a   Wu, M ^a  

^a Aegis Semiconductor Inc   (United States)

Author keywords

Amorphous silicon; Dielectric thin films; Optical fiber filters; Optical films; Plasma temperature; Semiconductor films; Semiconductor thin films; Sputtering; Transistors; Wavelength division multiplexing

Indexed keywords

AMORPHOUS FILMS; AMORPHOUS SEMICONDUCTORS; AMORPHOUS SILICON; OPTICAL FIBER COMMUNICATION; OPTICAL FIBERS; OPTICAL WAVEGUIDES; SEMICONDUCTING SILICON; SPUTTERING; THIN FILMS; TRANSISTORS; WAVELENGTH DIVISION MULTIPLEXING;

DIELECTRIC THIN FILMS; OPTICAL FIBER FILTERS; PLASMA TEMPERATURE; SEMICONDUCTOR FILMS; SEMICONDUCTOR THIN FILMS;

OPTICAL FILMS;

EID: 1642568699     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OFC.2003.315920     Document Type: Conference Paper

References (5)

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4. Cocorullo, Della Corte et al, "Measurement of the thermo-optic coefficient of a-Si:H at 1500 nm," J. Non-crystalline Sol., v. 299, p. 310, 2002.
5. Della Corte et al, "Study of the thermo-optic effect in hydrogenated amorphous silicon," Appl. Phys. Lett., v. 79, 2, p.168, 2001.