An enhanced EWMA controller for processes subject to random disturbances

Run-to-Run Control in Semiconductor Manufacturing

Volumn , Issue , 2000, Pages 289-308

  Guo, Ruey Shan ^a   Chen, Argon ^b   Chen, Jin Jung ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1642542186     PISSN: None     EISSN: None     Source Type: Book    
DOI: None     Document Type: Chapter

References (15)

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