Adsorption and Desorption Kinetics of Organosilanes at Si(001) Surfaces

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 11, 2003, Pages 6804-6808

  Senthil, Karuppanan ^a   Nakazawa, Hideki ^b   Suemitsu, Maki ^a  

^a TOHOKU UNIVERSITY   (Japan)

^b HIROSAKI UNIVERSITY   (Japan)

Author keywords

Adsorption kinetics; Dimethylsilane; Hydrogen desorption; Monomethylsilane; Organosilanes; Si(001); SIC

Indexed keywords

ADSORPTION; CHEMICAL BONDS; DESORPTION; DIMERS; DISSOCIATION; HYDROGEN; ORGANIC COMPOUNDS; REACTION KINETICS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SILANES; SURFACE REACTIONS; TEMPERATURE PROGRAMMED DESORPTION;

DIMER VACANCIES (DV); HETERODIMERS;

SEMICONDUCTING SILICON;

EID: 1642528893     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.6804     Document Type: Article

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