메뉴 건너뛰기
Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering
Volumn 39, Issue 6, 2003, Pages 71-74
Two-step penetration - A reliable method for the measurement of mechanical properties of thin films
Author keywords

Elastic modulus; Hardness; Nanomultilayer; Thin film; Two step penetration method
Indexed keywords

ELASTIC MODULI; HARDNESS; INDENTATION; MECHANICAL PROPERTIES; MULTILAYERS; NANOSTRUCTURED MATERIALS; NICKEL; TITANIUM NITRIDE;
EID: 1642495579     PISSN: 05776686     EISSN: None     Source Type: Journal    
DOI: 10.3901/jme.2003.06.071     Document Type: Article
Times cited : (7)
References (8)
  • 1
    • 0022505857 scopus 로고
    • A review of present state of art in hard coatings grown from the vapor phase
    • Sundgren J E, Hentzell H T G. A review of present state of art in hard coatings grown from the vapor phase. J. Vac. Sci. Technol.(A), 1986, 4(5): 2259-2279
    • (1986) J. Vac. Sci. Technol. (A) , vol.4 , Issue.5 , pp. 2259-2279
    • Sundgren, J.E.1    Hentzell, H.T.G.2
  • 2
    • 0000882773 scopus 로고
    • Nanoindentation study of the mechanical properties of copper-nickel multilayered thin films
    • Cammarata R C, Schlesinger T E. Nanoindentation study of the mechanical properties of copper-nickel multilayered thin films. Appl. Phys. Lett., 1990, 56(19): 1862-1864
    • (1990) Appl. Phys. Lett. , vol.56 , Issue.19 , pp. 1862-1864
    • Cammarata, R.C.1    Schlesinger, T.E.2
  • 3
    • 0033438070 scopus 로고    scopus 로고
    • The search for novel, superhard materials
    • Stan Veprek. The search for novel, superhard materials. J. Vac. Sci. Technol.(A), 1999, 17(5): 2401-2420
    • (1999) J. Vac. Sci. Technol. (A) , vol.17 , Issue.5 , pp. 2401-2420
    • Veprek, S.1
  • 4
    • 0026852996 scopus 로고
    • Growth, structure, and microhardness of epitaxial TiN/NbN superlattics
    • Shinn M, Hultman L, Barnett S A. Growth, structure, and microhardness of epitaxial TiN/NbN superlattics. J. Mater. Res., 1992, 7(4): 901-911
    • (1992) J. Mater. Res. , vol.7 , Issue.4 , pp. 901-911
    • Shinn, M.1    Hultman, L.2    Barnett, S.A.3
  • 5
    • 0021411716 scopus 로고
    • Hardness measurement of thin films
    • Jonsson B, Hogmark S. Hardness measurement of thin films. Thin Solid Films, 1984, 114: 257-269
    • (1984) Thin Solid Films , vol.114 , pp. 257-269
    • Jonsson, B.1    Hogmark, S.2
  • 6
    • 0026875935 scopus 로고
    • An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiment
    • Oliver W C, Pharr G M. An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiment. J. Mater. Res., 1992, 7(6): 1564-1583
    • (1992) J. Mater. Res. , vol.7 , Issue.6 , pp. 1564-1583
    • Oliver, W.C.1    Pharr, G.M.2
  • 7
    • 0020704909 scopus 로고
    • Elastic modulus in composition-modulated copper-nickel foils
    • Tsakalakos T, Hilliard J E. Elastic modulus in composition-modulated copper-nickel foils. J. Appl. Phys., 1983, 54(2): 734-737
    • (1983) J. Appl. Phys. , vol.54 , Issue.2 , pp. 734-737
    • Tsakalakos, T.1    Hilliard, J.E.2
  • 8
    • 0022012317 scopus 로고
    • Mechanical properties of composition modulated Cu-Ni foils
    • Baral D, Ketterson J B, Hilliard J E. Mechanical properties of composition modulated Cu-Ni foils. J. Appl. Phys., 1985, 57(4): 1076-1083
    • (1985) J. Appl. Phys. , vol.57 , Issue.4 , pp. 1076-1083
    • Baral, D.1    Ketterson, J.B.2    Hilliard, J.E.3

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.