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Volumn 10, Issue 2, 1996, Pages 151-159
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Adhesion improvement and intrinsic stress decrease in cerium oxide thin films by chopping
a
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Author keywords
Adhesion; Cerium oxide thin films; Chopping; Internal stress
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Indexed keywords
ADHESION IMPROVEMENT;
AGING EFFECTS;
CERIUM OXIDE THIN FILMS;
CERIUM OXIDES;
CHOPPING;
EXCESS OXYGEN;
HEATED SUBSTRATES;
INTERNAL STRESS;
INTRINSIC STRESS;
LOW TEMPERATURES;
OXYGEN AFFINITY;
WETTING CHARACTERISTICS;
CERIUM COMPOUNDS;
OXIDE FILMS;
OXIDES;
OXYGEN;
THIN FILMS;
X RAY DIFFRACTION;
ADHESION;
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EID: 1642491431
PISSN: 01694243
EISSN: 15685616
Source Type: Journal
DOI: 10.1163/156856196X00823 Document Type: Article |
Times cited : (12)
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References (21)
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