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Volumn 10, Issue 2, 1996, Pages 151-159

Adhesion improvement and intrinsic stress decrease in cerium oxide thin films by chopping

Author keywords

Adhesion; Cerium oxide thin films; Chopping; Internal stress

Indexed keywords

ADHESION IMPROVEMENT; AGING EFFECTS; CERIUM OXIDE THIN FILMS; CERIUM OXIDES; CHOPPING; EXCESS OXYGEN; HEATED SUBSTRATES; INTERNAL STRESS; INTRINSIC STRESS; LOW TEMPERATURES; OXYGEN AFFINITY; WETTING CHARACTERISTICS;

EID: 1642491431     PISSN: 01694243     EISSN: 15685616     Source Type: Journal    
DOI: 10.1163/156856196X00823     Document Type: Article
Times cited : (12)

References (21)
  • 12
    • 0003680984 scopus 로고
    • L. I. Maissel and R. Glang, McGraw-Hill, New York
    • D. S. Campbell, in: Handbook of Thin Film Technology, L. I. Maissel and R. Glang (Eds), pp. 12-23. McGraw-Hill, New York (1970).
    • (1970) Handbook of Thin Film Technology , pp. 12-23
    • Campbell, D.S.1
  • 20
    • 0020192607 scopus 로고
    • E. H. Hirsch, J. Phys. D 15, 1991 (1982).
    • (1982) , vol.15 , pp. 1991
    • Hirsch, E.H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.