64x64, 128x128 and 240x320 pixel uncooled IR bolometric detector arrays

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3061, Issue , 1997, Pages 236-247

  Jerominek, Hubert ^a   Pope, Timothy D ^a   Renaud, Martin ^a,c   Swart, Nicholas R ^a,d   Picard, Francis ^a   Lehoux, Mario ^a   Savard, Simon ^a   Bilodeau, Ghislain ^a   Audet, Danick ^a   Phong, Linh N ^b   Qiu, Chu N ^b  

^a INO   (Canada)

^b DEFENCE RESEARCH AND DEVELOPMENT CANADA VALCARTIER   (Canada)

^c Mitel Networks Corporation   (Canada)

^d ANALOG DEVICES INC   (United States)

Author keywords

Bolometer; Detector; Infrared; Micromachining; Uncooled; Vanadium dioxide

Indexed keywords

COMPOSITE MICROMECHANICS; DETECTORS; INFRARED DETECTORS; INFRARED RADIATION; INTEGRATED CIRCUITS; MACHINING; MICROMACHINING; PIXELS; TRANSITION METALS; VANADIUM; VANADIUM ALLOYS;

BOLOMETRIC DETECTORS; DEVICE CHARACTERIZATIONS; FABRICATION METHODS; INFRARED; READ OUT INTEGRATED CIRCUITS; UNCOOLED; VACUUM PACKAGES; VANADIUM DIOXIDE;

BOLOMETERS;

EID: 1642457060     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.280342     Document Type: Conference Paper

References (4)

1. L. Ristic (ed.), Sensor Technology and Devices, Artech House, Boston, 1994.
2. H. Jerominek, F. Picard and D. Vincent, "Vanadium oxide films for optical switching and detection", Opt. Eng. Vol. 32, No. 9, pp. 2092-2099, 1993.
3. 2-based IR bolometer arrays", Proc. SPIE 2746, pp. 60-71, 1996.
4. G.C. Holst, Testing and Evaluation of Infrared Imaging System, JSD Publishing, Maitland, 1993.