TDS applied to investigate the hydrogen and silane desorption from porous silicon

Physica Status Solidi (A) Applied Research

Volumn 182, Issue 1, 2000, Pages 255-260

  Martin P ^a   Fernandez J F ^a   Sanchez C R ^a  

^a UNIVERSIDAD AUTÓNOMA DE MADRID   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

ACTIVATION ENERGY; ELECTROCHEMISTRY; ETCHING; HEATING; HYDROGEN; MASS SPECTROMETRY; SILANES; SPECTROSCOPIC ANALYSIS; TEMPERATURE PROGRAMMED DESORPTION;

QUADRUPOLE MASS SPECTROMETER; THERMAL DESORPTION SPECTROSCOPY;

POROUS SILICON;

EID: 1642435480     PISSN: 00318965     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-396X(200011)182:1<255::AID-PSSA255>3.0.CO;2-S     Document Type: Article

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