Effects of oxide overlayer on thermal stress and yield behavior of AI alloy films

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2636-2644

  Yeo, I S ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 1642406258     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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