Crystallographic effects in micro/nanomachining of single-crystal calcium fluoride

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 1, 2004, Pages 46-51

  Yan, Jiwang ^a   Syoji, Katsuo ^b   Tamaki, Jun'ichi ^a  

^a KITAMI INSTITUTE OF TECHNOLOGY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; BOUNDARY CONDITIONS; BRITTLENESS; CRYSTAL ORIENTATION; CRYSTALLOGRAPHY; DIAMOND CUTTING TOOLS; INTERFEROMETRY; MICROMACHINING; OPTICAL MATERIALS; PHOTOLITHOGRAPHY; REFRACTIVE INDEX; SILICA; SINGLE CRYSTALS; STIFFNESS; SURFACE ROUGHNESS;

BRITTLE-DUCTILE TRANSITION BOUNDARY; LOCAL SURFACE CORRECTION; NANOMETRIC ROUGHNESS; PITCH POLISHING;

CALCIUM COMPOUNDS;

EID: 1642393846     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1633770     Document Type: Conference Paper

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