Fabrication and characterization of a monolithic thin-film edge emitter device with zinc-oxide-tungsten-based thin-film phosphor

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 1, 2004, Pages 165-170

  Bhatia, Vasuda ^a,b   Karpov, Leonid K ^a,c   Weichold, Mark H ^a  

^a TEXAS A AND M UNIVERSITY   (United States)

^b INDIAN INSTITUTE OF TECHNOLOGY KANPUR   (India)

^c Stellar Micro Devices   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON; CATHODES; CHROMIUM; DIELECTRIC MATERIALS; FABRICATION; FLAT PANEL DISPLAYS; PHOSPHORS; SILICON WAFERS; TUNGSTEN; ZINC OXIDE;

DIELECTRIC LAYERS; THIN-FILM PHOSPHORS;

THIN FILM DEVICES;

EID: 1642354883     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1640400     Document Type: Conference Paper

References (9)

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9. V. Bhatia, Ph.D. dissertation, Texas A&M University, 2001.