Fabrication of InP-based two-dimensional photonic crystal membrane

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 1, 2004, Pages 70-73

  Xing, Aimin ^a   Davanco, Marcelo ^a   Blumenthal, Daniel J ^a   Hu, Evelyn L ^a  

^a University of California   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BAND STRUCTURE; CRYSTAL STRUCTURE; DRY ETCHING; ELECTRON BEAM LITHOGRAPHY; ELECTRONIC STRUCTURE; LIGHT TRANSMISSION; PHOTONS; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS; WAVEGUIDES;

BAND GAP; PERIODIC MODULATION; PHOTONIC CRYSTAL MEMBRANES;

INDIUM COMPOUNDS;

EID: 1642330498     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1635848     Document Type: Conference Paper

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