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Volumn 17, Issue 3, 2004, Pages 527-531
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Ni overlayers on biaxially textured Ni-alloy and Cu substrates by DC sputtering
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Author keywords
[No Author keywords available]
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Indexed keywords
DEPOSITION RATE;
FILM THICKNESS;
OVERLAYERS;
SEED LAYER;
ATOMIC FORCE MICROSCOPY;
COPPER;
FILMS;
NICKEL ALLOYS;
SPUTTER DEPOSITION;
SUBSTRATES;
TEXTURES;
THERMAL EFFECTS;
X RAY DIFFRACTION ANALYSIS;
NICKEL;
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EID: 1642293423
PISSN: 09532048
EISSN: None
Source Type: Journal
DOI: 10.1088/0953-2048/17/3/037 Document Type: Article |
Times cited : (15)
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References (9)
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