Control of VOCs emissions by condenser pre-treatment in a semiconductor fab

Journal of Hazardous Materials

Volumn 120, Issue 1-3, 2005, Pages 9-14

  Lin, Yu Chih ^a   Chang, Feng Tang ^b   Bai, Hsunling ^a   Pei, Bau Shei ^b  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Adsorbent; DMDS; DMS; Optoelectronic industry; Semiconductor; TFT LCD; Volatile organic compounds

Indexed keywords

FILMS; PARTICULATE EMISSIONS; SEMICONDUCTOR MATERIALS; SOLUBILITY; VAPORS; ZEOLITES;

CONDENSORS; LIQUID FILMS; ZEOLITE CONCENTRATOR;

VOLATILE ORGANIC COMPOUNDS;

VOLATILE ORGANIC COMPOUND; WATER; ZEOLITE;

EMISSION CONTROL; VOLATILE ORGANIC COMPOUND;

ARTICLE; CONDENSER; COST BENEFIT ANALYSIS; EQUIPMENT; EQUIPMENT DESIGN; FILM; LIQUID; PERFORMANCE; SEMICONDUCTOR; SOLUBILITY; TEMPERATURE; TIME; WATER VAPOR;

EID: 16344376728     PISSN: 03043894     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jhazmat.2004.12.035     Document Type: Article

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