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Volumn , Issue , 2004, Pages 105-106
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Low loss silicon window material for submillimeter waves using micromachined artificial dielectrics for anti-reflection coating
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Author keywords
[No Author keywords available]
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Indexed keywords
ANTIREFLECTION COATINGS;
BANDWIDTH;
DIELECTRIC MATERIALS;
ELECTROMAGNETIC WAVE POLARIZATION;
INTERFACES (MATERIALS);
MATHEMATICAL MODELS;
MICROMACHINING;
PERMITTIVITY;
SUBMILLIMETER WAVES;
VACUUM;
AIR-SILICON INTERFACE;
ARTIFICIAL DIELECTRICS;
LOW LOSS SILICON WINDOW;
VACUUM CHAMBERS;
SILICON WAFERS;
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EID: 16244421731
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper |
Times cited : (11)
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References (5)
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