Low voltage high isolation MEMS switches

2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, SiRF 2001

Volumn , Issue , 2001, Pages 47-49

  Blondy, P ^a   Cros, D ^a   Guillon, P ^b   Rey, P ^b   Charvet, P ^c   Diem, B ^d   Zanchi, C ^a   Quoirin, J B ^a  

^a UNIVERSITY OF LIMOGES   (France)

^b CEA LETI   (France)

^c CNES   (Germany)

^d STMICROELECTRONICS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUITS; SILICON WAFERS;

CMOS COMPATIBLE; DIELECTRIC MEMBRANES; HIGH ISOLATION; LONG TERM DURABILITY; METALLIC CONTACTS; RESISTIVE SWITCHES; RF FREQUENCIES; WAFER-SCALE PACKAGING;

MONOLITHIC INTEGRATED CIRCUITS;

EID: 16244396021     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMIC.2001.942339     Document Type: Conference Paper

References (0)