A cyclic microbend study on LIGA Ni microelectromechanical systems thin films

Journal of Engineering Materials and Technology

Volumn 127, Issue 1, 2005, Pages 16-22

  Lou, J ^a   Shrotriya, P ^a   Soboyejo, W O ^b  

^a Brown University   (United States)

^b Princeton University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEFORMATION; ELASTIC MODULI; ELECTRODEPOSITION; FATIGUE OF MATERIALS; LITHOGRAPHY; MICROELECTROMECHANICAL DEVICES; MICROSTRUCTURE; NICKEL ALLOYS; PLASTICITY; STRAIN;

CYCLIC DEFORMATION; LENGTH-SCALE PARAMETERS; MICROMIRRORS; MICROSCALE SYSTEMS;

THIN FILMS;

EID: 15844417601     PISSN: 00944289     EISSN: None     Source Type: Journal    
DOI: 10.1115/1.1836767     Document Type: Conference Paper

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