Anomalous evaporation characteristics of vitrificated K(DPM) and stable gas supply using disk-shaped K(DPM) precursors for metalorganic chemical vapor deposition

Journal of Crystal Growth

Volumn 277, Issue 1-4, 2005, Pages 546-554

  Onoe, Atsushi ^a   Tasaki, Yuzo ^b   Chikuma, Kiyofumi ^a  

^a PIONEER CORPORATION   (Japan)

^b Toshima MFG Co Ltd   (Japan)

Author keywords

A1. Mass transfer; A3. Metalorganic chemical vapor deposition; B1. Niobates; B1. Organic compounds; B1. Potassium compounds

Indexed keywords

EVAPORATION; GAS SUPPLY; MASS TRANSFER; METALLORGANIC CHEMICAL VAPOR DEPOSITION; NIOBIUM COMPOUNDS; ORGANIC COMPOUNDS; SOLIDIFICATION; THIN FILMS; VITRIFICATION;

CRYSTAL FILMS; DIPIVALOYLMETHANATOPOTASSIUM [K(DPM)]; NIOBATES; POTASSIUM PRECURSORS;

POTASSIUM COMPOUNDS;

EID: 15844392370     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2005.01.077     Document Type: Article

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