Improving reliability of beveled power semiconductor devices passivated by SIPOS

Microelectronics Reliability

Volumn 45, Issue 3-4, 2005, Pages 535-539

  Wang, Ying ^a   Zhu, Changchun ^a   Wu, Chunyu ^a   Liu, Junhua ^a  

^a XI'AN JIAOTONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; FILM PREPARATION; GLOW DISCHARGES; PASSIVATION; POLYIMIDES; POLYSILICON; SILICON;

DIELECTRIC STRENGTHS; PASSIVANTS; POWER SEMICONDUCTOR DEVICES; ROOM TEMPERATURE (RT);

SEMICONDUCTOR DEVICES;

EID: 15744405288     PISSN: 00262714     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.microrel.2004.10.005     Document Type: Article

References (15)

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