Analysis of silicon thin film prepared at different hydrogen dilutions by VHF-PECVD

Rengong Jingti Xuebao/Journal of Synthetic Crystals

Volumn 34, Issue 1, 2005, Pages

  Zhang, Xiao Dan ^a,b   Gao, Yan Tao ^a,b   Zhao, Ying ^a,b   Zhu, Feng ^a,b   Wei, Chang Chun ^a,b   Sun, Jian ^a,b   Hou, Guo Fu ^a,b   Xue, Jun Ming ^a,b   Zhang, De Kun ^a,b   Ren, Hui Zhi ^a,b   Geng, Xin Hua ^a,b   Xiong, Shao Zhen ^a,b  

^a NANKAI UNIVERSITY   (China)

^b Key Laboratory of Photo electronics Thin Film Devices and Technique of Tianjin   (China)

Author keywords

Flourier transform infrared absorption; Microcrystalline silicon thin film; VHF PECVD

Indexed keywords

EID: 15744393502     PISSN: 1000985X     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (11)