Micro Optical Probe Sensor (MOPS) for dynamic in-plane displacement sensing

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5532, Issue , 2004, Pages 73-78

  Asundi, Anand Krishna ^a   Luo, Xiaoming ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

Author keywords

Dynamic measurement; In plane displacement; Micro optical probe sensor (MOPS); Reflection grating

Indexed keywords

DYNAMIC MEASUREMENT; IN-PLANE DISPLACEMENT; MICRO OPTICAL PROBE SENSOR (MOPS); REFLECTION GRATING;

ACTUATORS; DIFFRACTION GRATINGS; LIGHT REFLECTION; MICROOPTICS; NONDESTRUCTIVE EXAMINATION; PHOTODETECTORS; SEMICONDUCTOR LASERS; VIBRATION MEASUREMENT; WAVEFORM ANALYSIS;

OPTICAL SENSORS;

EID: 15744380744     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.557504     Document Type: Conference Paper

References (5)

1. Warren J. Smith, Modern optical engineering: the design of optical systems, New York: McGraw Hill, 2000.
2. Gerald F. Marshall, Optical scanning, New York: Marcel Dekker, Inc., Chap. 13, c1991
3. Ronald N. Bracewell, The Fourier transform and its applications, Boston: WCB/McGraw Hill, Chap. 15, c2000,
4. Xian-Yu Su and Wen-Sen ZhouG. von Bally and D. Vukicevic, Automated phase-measuring profilometry using defocused projection of a Ronchi grating, Optics Communications, Volume 94, Issue 6, 15 December 1992, Pages 561-573
5. K. Pohlmann, The Compact Disk Handbook, A-R Editions, 1992