Phase-shifting multi-wavelength dynamic interferometer

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5531, Issue , 2004, Pages 64-75

  North Morris, Michael B ^a   Millerd, James E ^a   Brock, Neal J ^a   Hayes, John B ^a  

^a 4D Technology Corporation   (United States)

Author keywords

Interferometry; Multiple Wavelength; Surface Measurement

Indexed keywords

DYNAMIC INTERFEROMETER; INTERFEROGRAMS; MULTIPLE WAVELENGTH; SPATIAL INTERFERENCE PATTERNS;

CAMERAS; CHARGE COUPLED DEVICES; ERROR ANALYSIS; INTERFEROMETRY; LIGHT INTERFERENCE; LIGHT MEASUREMENT; PHASE SHIFT; PROFILOMETRY; SURFACE MEASUREMENT;

INTERFEROMETERS;

EID: 15744371419     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.560829     Document Type: Conference Paper

References (7)

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